Micro and Nano-Metrology

Over the recent years, micro-features as part of micro-manufacturing processes are taking increasing relevance. Such micro aspects are key in developing the capabilities and performances of next generation products. Biology, health, electronic, optics, transportation and energy industries are examples of business sectors already benefiting from such processes. However, compared to manufacturing processes at the micro- and nano-meter level, the ability to control, measure and characterise such dimensional features in 3D needs to be further developed. Micro- and nano-metrology are key technologies that need proper consideration to address the issue. Hence,
Innovalia Association research focuses on the design, development and evaluation at nanometer scales of both specific procedures and instrumentation to leverage the mass production of micro-and nano-manufacturing products.
Innovalia Association research addresses the following challenges:

• Nano-probing technologies for highly accessible, ultra-precision, 3D isotropic dimensional characterisation of micro-parts.
• Non-contact nano-optical sensor technology for large area, ultra-precsision nano-surface and material characterisation.
• 3D nano-calibration artefacts and verification processes.
• High-stability, high-precision motion systems and high-speed nano-control system integration for large volume micro-feature characterisation.
• Software-assisted nano measurement processes for high-accuracy, low uncertainty, multi-sensor and multi-probe 3D dimensional control.